Thin piece polishing method in double-sided polishing machine

両面研磨機における薄片の研磨方法

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin piece polishing method in a double-sided polishing machine capable of polishing a thin piece remarkably thin in comparison with a conventional one. <P>SOLUTION: In this thin piece polishing method in the double-sided polishing machine for polishing a workepiece, while pushing the workpiece to a rotary surface plate, the workpiece 1 is attached to a surface and a back surface of a base plate 5 arranged in a carrier hole 4, and polished. A refrigerated chuck is used to attach the workpiece 1 to the surface and the back surface of the base plate 5. <P>COPYRIGHT: (C)2005,JPO&NCIPI
【課題】両面研磨機における薄片の研磨方法を提供する。 【解決手段】加工対象物を回転定盤に押し付けながら研磨加工をする両面研磨機における薄片の研磨方法において、の加工対象物1をキャリア穴4に配置されたベースプレート5の表裏に貼付して加工対象物1を研磨することを特徴とし、また、加工対象物1をベースプレート5の表裏に貼付するのに冷凍チャックを用いる。 【選択図】 図1

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    JP-2011131284-AJuly 07, 2011Disco Abrasive Syst Ltd, 株式会社ディスコ研削装置